Growth Low energy electron diffraction LEED Silica Energy loss 17Op Auger electron spectroscopy AES Magnetic semiconductors RBS Magnetic anisotropy AC susceptibility Nuclear resonance profiling NRP NRA XRD Hysteresis Indium oxide NRP Channeling Atomic Layer Deposition ALD Evaluation Silicon carbide SiC Raman spectroscopy 17O Oxidation Nanostructures 18O resonance Nickel 7630Lh 18O GaMnAs Ion implantation Photoluminescence Topological defects 27Aldp Sputtering 15N Adsorption 2H Adsorption Isotherms Passivation Epitaxy 7550Ee Acoustic HfO2 Magnetization curves Gold Defects PIXE X-ray diffraction Isotopic Tracing Nanoparticles Measurement Transparent conductive oxide TCO ALD 27Ald p&α 8140Ef XPS Nuclear reaction analysis Nitridation Aluminum Ion beam analysis Epitaxial growth 7550Pp EPR Ageing Multilayer Aluminium 13C 27Alda Topological insulators Silicon Carbide ADSORPTION DESORPTION HYSTERESIS Thin films Capillary condensation Alloys 17Opp Annealing Interface defects Charge exchange Adsorbed layers Thin film Acoustic propreties of solid Density functional theory Kossel diffraction Rutherford backscattering spectrometry RBS Ferromagnetic resonance 3C-SiC Diffusion Pb centers Oxygen deficiency Stable isotopic tracing Al2O3 AFM Silicon Gallium oxide Metal-insulator transition 6855Jk Pulsed laser deposition Zinc oxide Periodic multilayer