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Thin films for gas sensors

Abstract : Thin tin dioxide films are used as sensitive elements for gas sensors. The physical properties of such materials and their electrical performance largely depend on their methods of production. This work presents two methods used to produce thin dioxide films, i.e., chemical vapour deposition and reactive evaporation. Optimization of the deposition parameters enables us to process highly sensitive materials and even materials able to discriminate between certain gases, such as alcohol, benzene or hydrogen sulphide.
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https://hal-emse.ccsd.cnrs.fr/emse-00433382
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Submitted on : Thursday, November 19, 2009 - 10:23:23 AM
Last modification on : Wednesday, June 24, 2020 - 4:18:18 PM

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René Lalauze, Philippe Breuil, Christophe Pijolat. Thin films for gas sensors. Sensors and Actuators B: Chemical, Elsevier, 1991, 3 (3), pp.175-182. ⟨10.1016/0925-4005(91)80003-3⟩. ⟨emse-00433382⟩

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