The importance of the self-diffusion of a metal during its oxidation by a gas is treated for the cases of nonstoichiometric oxides having either interstitial cation or cation vacancies. We have established a general relationship for the reaction rate when a mixed diffusion process occurs. From this relationship, we have shown that the pressure dependence can be different, according to whether the rate-determining process is the self-diffusion through the metal or through the product.