Optimizing flexibility and equipment utilization through qualification management

Abstract : In order to use semiconductor manufacturing equipment more efficiently, a Decision Support System (DSS) has been developed, which suggests on which tools processes should be qualified. The DSS suggests qualifications that optimize earlier developed flexibility measures. This article studies which impact the suggested qualifications may have on the performance in various wafer fab workshops.
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Conference papers
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https://hal-emse.ccsd.cnrs.fr/emse-00456082
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Submitted on : Thursday, February 11, 2010 - 4:58:06 PM
Last modification on : Thursday, October 17, 2019 - 12:36:32 PM

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Carl Johnzén, Stéphane Dauzère-Pérès, Philippe Vialletelle, Claude Yugma. Optimizing flexibility and equipment utilization through qualification management. Advanced Semiconductor Manufacturing Conference, 2009. ASMC '09. IEEE/SEMI, May 2009, Berlin, Germany. pp.137-140, ⟨10.1109/ASMC.2009.5155962⟩. ⟨emse-00456082⟩

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