Skip to Main content Skip to Navigation
Conference papers

Optimizing flexibility and equipment utilization through qualification management

Abstract : In order to use semiconductor manufacturing equipment more efficiently, a Decision Support System (DSS) has been developed, which suggests on which tools processes should be qualified. The DSS suggests qualifications that optimize earlier developed flexibility measures. This article studies which impact the suggested qualifications may have on the performance in various wafer fab workshops.
Document type :
Conference papers
Complete list of metadatas

https://hal-emse.ccsd.cnrs.fr/emse-00456082
Contributor : Sabine Salmeron <>
Submitted on : Thursday, February 11, 2010 - 4:58:06 PM
Last modification on : Wednesday, June 24, 2020 - 4:19:21 PM

Identifiers

Citation

Carl Johnzén, Stéphane Dauzère-Pérès, Philippe Vialletelle, Claude Yugma. Optimizing flexibility and equipment utilization through qualification management. Advanced Semiconductor Manufacturing Conference, 2009. ASMC '09. IEEE/SEMI, May 2009, Berlin, Germany. pp.137-140, ⟨10.1109/ASMC.2009.5155962⟩. ⟨emse-00456082⟩

Share

Metrics

Record views

476