Optimizing flexibility and equipment utilization through qualification management

Abstract : In order to use semiconductor manufacturing equipment more efficiently, a Decision Support System (DSS) has been developed, which suggests on which tools processes should be qualified. The DSS suggests qualifications that optimize earlier developed flexibility measures. This article studies which impact the suggested qualifications may have on the performance in various wafer fab workshops.
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Communication dans un congrès
Advanced Semiconductor Manufacturing Conference, 2009. ASMC '09. IEEE/SEMI, May 2009, Berlin, Germany. IEEE, pp.137-140, 2009, 〈10.1109/ASMC.2009.5155962〉
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https://hal-emse.ccsd.cnrs.fr/emse-00456082
Contributeur : Sabine Salmeron <>
Soumis le : jeudi 11 février 2010 - 16:58:06
Dernière modification le : mercredi 29 novembre 2017 - 10:07:09

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Carl Johnzén, Stéphane Dauzère-Pérès, Philippe Vialletelle, Claude Yugma. Optimizing flexibility and equipment utilization through qualification management. Advanced Semiconductor Manufacturing Conference, 2009. ASMC '09. IEEE/SEMI, May 2009, Berlin, Germany. IEEE, pp.137-140, 2009, 〈10.1109/ASMC.2009.5155962〉. 〈emse-00456082〉

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