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Conference papers

Nanoindentation de couches dures ultramines de ruthénium sur or

Brice Arrazat 1, * Vincent Mandrillon 2 Karim Inal 1
* Corresponding author
1 PS2-ENSMSE - Département Packaging et Supports Souples
2 LCFM/LETI
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Conference papers
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https://hal-emse.ccsd.cnrs.fr/emse-00533722
Contributor : Karim Inal <>
Submitted on : Monday, November 8, 2010 - 11:36:12 AM
Last modification on : Wednesday, June 24, 2020 - 4:18:19 PM

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  • HAL Id : emse-00533722, version 1

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CEA | PS2-ENSMSE | EMSE | CMP-ENSMSE | INSTITUT-TELECOM

Citation

Brice Arrazat, Vincent Mandrillon, Karim Inal. Nanoindentation de couches dures ultramines de ruthénium sur or. Materiaux 2010, Oct 2010, Nantes, France. pp.0641. ⟨emse-00533722⟩

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