Implementation of MIMO R2R control regulation on furnaces processes

Abstract : With geometries scaling down and the considerable multiplication of process recipes used in production for the same furnace, it becomes more and more difficult and hard to tune all process recipes correctly to achieve target deposition thickness performances. In this paper diffusion furnace recipes control using run to run (R2R) will be presented and described. The goal is to be able to control all furnace recipes using transfer models and corrective factors
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Contributor : Agnès Roussy <>
Submitted on : Wednesday, December 15, 2010 - 4:17:34 PM
Last modification on : Tuesday, October 23, 2018 - 2:36:10 PM


  • HAL Id : emse-00547117, version 1


Agnès Roussy, Benoist Richard, Laurent Brun, Denis Pompier, Cyril Allegret, et al.. Implementation of MIMO R2R control regulation on furnaces processes. IEEE/SEMI ASMC 2010, Jul 2010, San Francisco, United States. pp.143-148. ⟨emse-00547117⟩



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