This Special Issue on novel models and approaches for semiconductor manufacturing aims at discussing various problem areas faced by semiconductor manufacturing especially in view of the increased wafer size and complexity of the technology involved. The advancement in technology has enabled fabrication of chips of increasingly complex functionalities and use of larger size wafers. This, in turn, requires development of advanced and effective information and control systems at all decision levels of the underlying supply chain, from manufacturing processes to strategic planning. The seven papers that have been selected for this Special Issue cover several problems that are encountered at these decision levels.