Microstructure evolution of gold thin films under spherical indentation for micro switches contact applications - Mines Saint-Étienne Access content directly
Conference Papers Year : 2010

Microstructure evolution of gold thin films under spherical indentation for micro switches contact applications

Abstract

RF MEMS (Radio Frequency Micro Electro Mechanical System) switches are promising devices but their gold-on-gold contacts, assimilated for this work to a sphere / plane contact, represent a major reliability issue. A first step towards failure mechanism understanding is the investigation of the contact metal microstructure evolution under static and cyclic loading. After static and cyclic loading of sputtered gold thin films under spherical indentation, high resolution Electron Back Scatter Diffraction (EBSD) is used to investigate contact area. Grain rotation against {111} fiber texture of 1 μm thick sputtered gold thin film is a signature of plastic deformation. Grain rotation is observed above 1.6 mN under static loading by a spherical diamond indenter with 50 μm tip radius. A heterogeneity in grain rotation is observed corresponding to a more important plastic deformation in the middle of the indent than at the edge. A 30° Grain rotation is observed for a half million mechanical cycles under 300 μN load by a spherical gold tip (20 μm radius) due to cyclic work hardening. The same test in hot switching mode induces a grain growth in the contact area. Therefore thermal effects occurring during hot switching are underlined
Fichier principal
Vignette du fichier
EMRS_Arrazat_2010.pdf (422.57 Ko) Télécharger le fichier
Origin : Files produced by the author(s)
Loading...

Dates and versions

emse-00554023 , version 1 (10-01-2011)

Identifiers

  • HAL Id : emse-00554023 , version 1

Cite

Brice Arrazat, Vincent Mandrillon, Karim Inal, Maxime Vincent, Christophe Poulain. Microstructure evolution of gold thin films under spherical indentation for micro switches contact applications. European Materials Research Society 2010, Jun 2010, Strasbourg, France. ⟨emse-00554023⟩
282 View
410 Download

Share

Gmail Facebook X LinkedIn More