Conference Papers
Year : 2010
Christian Ernst : Connect in order to contact the contributor
https://hal-emse.ccsd.cnrs.fr/emse-00554762
Submitted on : Tuesday, January 11, 2011-12:07:04 PM
Last modification on : Tuesday, September 17, 2024-3:46:12 PM
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- HAL Id : emse-00554762 , version 1
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Alain Casali, Christian Ernst. A KDD Model to Discover Correlated Parameters in Semiconductor Manufacturing Processes. 10th European Conference on Advanced Equipment Control / Advanced Process Control, Apr 2010, Catania, Italy. ⟨emse-00554762⟩
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