Conference Papers Year : 2010

A KDD Model to Discover Correlated Parameters in Semiconductor Manufacturing Processes

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Other [cs.OH]
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Dates and versions

emse-00554762 , version 1 (11-01-2011)

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  • HAL Id : emse-00554762 , version 1

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Alain Casali, Christian Ernst. A KDD Model to Discover Correlated Parameters in Semiconductor Manufacturing Processes. 10th European Conference on Advanced Equipment Control / Advanced Process Control, Apr 2010, Catania, Italy. ⟨emse-00554762⟩
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