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Pyrolysis of a polysilazane precursor to SiCN ceramics

Abstract : A polysilazane precursor was studied from 500 to 1600°C by means of thermogravimetry and associated mass spectrometry. At 550°C, opposite influences of methane and hydrogen partial pressures on the weight loss were evidenced. At 1600°C, the amorphous solid crystallizes into silicon, silicon carbide and silicon nitride phases by producing carbon and silicon monoxides and nitrogen.
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https://hal-emse.ccsd.cnrs.fr/emse-00610368
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Submitted on : Thursday, July 21, 2011 - 4:40:54 PM
Last modification on : Wednesday, June 24, 2020 - 4:18:16 PM

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Marie Gabrielle Salvetti, Michèle Pijolat, Michel Soustelle. Pyrolysis of a polysilazane precursor to SiCN ceramics. Solid State Ionics, Elsevier, 1993, 63-65, pp.332-339. ⟨10.1016/0167-2738(93)90125-M⟩. ⟨emse-00610368⟩

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