Pyrolysis of a polysilazane precursor to SiCN ceramics

Abstract : A polysilazane precursor was studied from 500 to 1600°C by means of thermogravimetry and associated mass spectrometry. At 550°C, opposite influences of methane and hydrogen partial pressures on the weight loss were evidenced. At 1600°C, the amorphous solid crystallizes into silicon, silicon carbide and silicon nitride phases by producing carbon and silicon monoxides and nitrogen.