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Journal Articles Solid State Ionics Year : 1993

Pyrolysis of a polysilazane precursor to SiCN ceramics

Abstract

A polysilazane precursor was studied from 500 to 1600°C by means of thermogravimetry and associated mass spectrometry. At 550°C, opposite influences of methane and hydrogen partial pressures on the weight loss were evidenced. At 1600°C, the amorphous solid crystallizes into silicon, silicon carbide and silicon nitride phases by producing carbon and silicon monoxides and nitrogen.

Dates and versions

emse-00610368 , version 1 (21-07-2011)

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Marie Gabrielle Salvetti, Michèle Pijolat, Michel Soustelle. Pyrolysis of a polysilazane precursor to SiCN ceramics. Solid State Ionics, 1993, 63-65, pp.332-339. ⟨10.1016/0167-2738(93)90125-M⟩. ⟨emse-00610368⟩
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