Conference Papers Year : 2011

Investigation of local stress around TSVs by micro-Raman spectroscopy and finite element simulation

François Le Texier
  • Function : Author
  • PersonId : 913246
Département Packaging et Supports Souples
Jessica Mazuir
  • Function : Author
  • PersonId : 913247
Département Packaging et Supports Souples
Man Su
  • Function : Author
  • PersonId : 869024
Département Packaging et Supports Souples
Mohamed Saadaoui
  • Function : Author
  • PersonId : 868636
Département Packaging et Supports Souples
Jean-Luc Liotard
  • Function : Author
  • PersonId : 913248
STMicroelectronics [Rousset]
Karim Inal
Département Packaging et Supports Souples
CV

Domains

Materials

François Le Texier  : Connect in order to contact the contributor

https://hal-emse.ccsd.cnrs.fr/emse-00638030

Submitted on : Thursday, November 3, 2011-4:01:13 PM

Last modification on : Tuesday, September 17, 2024-3:45:54 PM

No file

Dates and versions

emse-00638030 , version 1 (03-11-2011)

Identifiers

Cite

François Le Texier, Jessica Mazuir, Man Su, Mohamed Saadaoui, Jean-Luc Liotard, et al.. Investigation of local stress around TSVs by micro-Raman spectroscopy and finite element simulation. International Interconnect Technology Conference and Materials for Advanced Metallization 2011, May 2011, Dresde, Germany. pp.1-3, ⟨10.1109/IITC.2011.5940351⟩. ⟨emse-00638030⟩

Export

BibTeX XML-TEI Dublin Core DC Terms EndNote DataCite

Collections

EMSE CMP-ENSMSE PS2-ENSMSE INSTITUT-MINES-TELECOM
109 View
0 Download

Altmetric

Share

More