Investigation of local stress around TSVs by micro-Raman spectroscopy and finite element simulation - Mines Saint-Étienne Access content directly
Conference Papers Year : 2011

Investigation of local stress around TSVs by micro-Raman spectroscopy and finite element simulation

Jessica Mazuir
  • Function : Author
  • PersonId : 913247
Man Su
  • Function : Author
  • PersonId : 869024
Mohamed Saadaoui
  • Function : Author
  • PersonId : 868636
Jean-Luc Liotard
  • Function : Author
  • PersonId : 913248
Karim Inal

Domains

Materials
No file

Dates and versions

emse-00638030 , version 1 (03-11-2011)

Identifiers

Cite

François Le Texier, Jessica Mazuir, Man Su, Mohamed Saadaoui, Jean-Luc Liotard, et al.. Investigation of local stress around TSVs by micro-Raman spectroscopy and finite element simulation. International Interconnect Technology Conference and Materials for Advanced Metallization 2011, May 2011, Dresde, Germany. pp.1-3, ⟨10.1109/IITC.2011.5940351⟩. ⟨emse-00638030⟩
101 View
0 Download

Altmetric

Share

Gmail Facebook X LinkedIn More