Conference Papers
Year : 2011
François Le Texier : Connect in order to contact the contributor
https://hal-emse.ccsd.cnrs.fr/emse-00638030
Submitted on : Thursday, November 3, 2011-4:01:13 PM
Last modification on : Tuesday, September 17, 2024-3:45:54 PM
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François Le Texier, Jessica Mazuir, Man Su, Mohamed Saadaoui, Jean-Luc Liotard, et al.. Investigation of local stress around TSVs by micro-Raman spectroscopy and finite element simulation. International Interconnect Technology Conference and Materials for Advanced Metallization 2011, May 2011, Dresde, Germany. pp.1-3, ⟨10.1109/IITC.2011.5940351⟩. ⟨emse-00638030⟩
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