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Investigation of local stress around TSVs by micro-Raman spectroscopy and finite element simulation

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https://hal-emse.ccsd.cnrs.fr/emse-00638030
Contributor : François Le Texier <>
Submitted on : Thursday, November 3, 2011 - 4:01:13 PM
Last modification on : Wednesday, June 24, 2020 - 4:18:19 PM

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François Le Texier, Jessica Mazuir, Man Su, Mohamed Saadaoui, Jean-Luc Liotard, et al.. Investigation of local stress around TSVs by micro-Raman spectroscopy and finite element simulation. International Interconnect Technology Conference and Materials for Advanced Metallization 2011, May 2011, Dresde, Germany. pp.1-3, ⟨10.1109/IITC.2011.5940351⟩. ⟨emse-00638030⟩

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