Investigation of local stress around TSVs by micro-Raman spectroscopy and finite element simulation

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Communication dans un congrès
International Interconnect Technology Conference and Materials for Advanced Metallization 2011, May 2011, Dresde, Germany. pp.1-3, 2011, 〈10.1109/IITC.2011.5940351〉
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https://hal-emse.ccsd.cnrs.fr/emse-00638030
Contributeur : François Le Texier <>
Soumis le : jeudi 3 novembre 2011 - 16:01:13
Dernière modification le : mercredi 29 novembre 2017 - 10:07:58

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François Le Texier, Jessica Mazuir, Man Su, Mohamed Saadaoui, Jean-Luc Liotard, et al.. Investigation of local stress around TSVs by micro-Raman spectroscopy and finite element simulation. International Interconnect Technology Conference and Materials for Advanced Metallization 2011, May 2011, Dresde, Germany. pp.1-3, 2011, 〈10.1109/IITC.2011.5940351〉. 〈emse-00638030〉

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