Design and operation of automated material handling systems for IC wafer semiconductor manufacturing - Mines Saint-Étienne
Conference Papers Year : 2004

Design and operation of automated material handling systems for IC wafer semiconductor manufacturing

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Modeling and Simulation

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https://hal-emse.ccsd.cnrs.fr/emse-00712654

Submitted on : Wednesday, June 27, 2012-4:13:58 PM

Last modification on : Tuesday, September 17, 2024-3:45:54 PM

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emse-00712654 , version 1 (27-06-2012)

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  • HAL Id : emse-00712654 , version 1

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Jairo R. Montoya-Torres, L. Vermarien, Jean−pierre Campagne, Hélène Marian. Design and operation of automated material handling systems for IC wafer semiconductor manufacturing. 2nd International Industrial Simulation Conference 2004 (ISC'2004), Jun 2004, Malaga, Spain. p. 175-179. ⟨emse-00712654⟩

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