Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

Abstract : Scheduling in semiconductor manufacturing is of vital importance due to the impact on production performance indicators such as equipment utilization, cycle time, and delivery times. With the increasing complexity of semiconductor manufacturing, ever-new products and demanding customers, scheduling plans for efficient production control become crucial. Scheduling and control are mutually dependent as control requires information from scheduling, for example, where jobs are processed, and scheduling requires control information, for example, on which equipment operations can be processed. Based on a survey of the literature, this article proposes a review and an outlook for the potential improvements by binding scheduling decisions and information coming from advanced process control systems in semiconductor manufacturing.
Document type :
Journal articles
Complete list of metadatas

https://hal-emse.ccsd.cnrs.fr/emse-01555604
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Tuesday, July 4, 2017 - 11:49:54 AM
Last modification on : Friday, March 15, 2019 - 1:14:57 AM

Identifiers

Citation

Claude Yugma, Jakey Blue, Stéphane Dauzere-Peres, Ali Obeid. Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook. Journal of Scheduling, Springer Verlag, 2015, 18 (2), pp.195-205. ⟨10.1007/s10951-014-0381-1⟩. ⟨emse-01555604⟩

Share

Metrics

Record views

119