Equipment Condition Diagnosis and Fault Fingerprint Extraction in Semiconductor Manufacturing - Mines Saint-Étienne
Conference Papers Year : 2016

Equipment Condition Diagnosis and Fault Fingerprint Extraction in Semiconductor Manufacturing

Hamideh Rostami
  • Function : Author
  • PersonId : 1021551
Département Sciences de la Fabrication et Logistique
Jakey Blue
  • Function : Author
  • PersonId : 2172
  • IdHAL : jakey-blue
Département Sciences de la Fabrication et Logistique
Claude Yugma
  • Function : Author
  • PersonId : 868326
Département Sciences de la Fabrication et Logistique

Domains

Artificial Intelligence [cs.AI] Databases [cs.DB] Signal and Image Processing

Hamideh Rostami  : Connect in order to contact the contributor

https://hal-emse.ccsd.cnrs.fr/emse-01621963

Submitted on : Monday, October 23, 2017-9:39:14 PM

Last modification on : Tuesday, September 17, 2024-3:45:43 PM

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emse-01621963 , version 1 (23-10-2017)

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  • HAL Id : emse-01621963 , version 1

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Hamideh Rostami, Jakey Blue, Claude Yugma. Equipment Condition Diagnosis and Fault Fingerprint Extraction in Semiconductor Manufacturing. IEEE International Conferenc on Machine Learning and Applications (ICMLA), Dec 2016, Anaheim, United States. ⟨emse-01621963⟩

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