Conference Papers
Year : 2017
Hamideh Rostami : Connect in order to contact the contributor
https://hal-emse.ccsd.cnrs.fr/emse-01621974
Submitted on : Monday, October 23, 2017-9:54:22 PM
Last modification on : Tuesday, September 17, 2024-3:45:20 PM
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- HAL Id : emse-01621974 , version 1
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Hamideh Rostami, Jakey Blue, Claude Yugma. Equipment Deterioration Prognosis and Fault Diagnosis in Semiconductor Manufacturing. European advanced process control and manufacturing (apc|m) Conference, Apr 2017, Dublin, Ireland. ⟨emse-01621974⟩
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