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Conference Papers Year : 2017

Equipment Health Diagnosis and Prognosis using a Wavelet-based Windowing Approach in Semiconductor Manufacturing

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emse-01621977 , version 1 (23-10-2017)

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  • HAL Id : emse-01621977 , version 1

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Hamideh Rostami, Jakey Blue, Claude Yugma. Equipment Health Diagnosis and Prognosis using a Wavelet-based Windowing Approach in Semiconductor Manufacturing. Advanced Process Control Conference, Oct 2017, Austin,TX, United States. ⟨emse-01621977⟩
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