Equipment Health Diagnosis and Prognosis using a Wavelet-based Windowing Approach in Semiconductor Manufacturing

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https://hal-emse.ccsd.cnrs.fr/emse-01621977
Contributor : Hamideh Rostami <>
Submitted on : Monday, October 23, 2017 - 9:56:46 PM
Last modification on : Tuesday, October 23, 2018 - 2:36:10 PM

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  • HAL Id : emse-01621977, version 1

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Hamideh Rostami, Jakey Blue, Claude Yugma. Equipment Health Diagnosis and Prognosis using a Wavelet-based Windowing Approach in Semiconductor Manufacturing. Advanced Process Control Conference, Oct 2017, Austin,TX, United States. ⟨emse-01621977⟩

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