Yu-Ting Kao, Shi-Chung Chang, Jakey Blue, Stéphane Dauzère-Pérès. Generalized Overall Equipment Effectiveness for integrated scheduling and process control.
2016 International Symposium on Semiconductor Manufacturing (ISSM), Dec 2016, Tokyo, Japan.
⟨10.1109/ISSM.2016.7934514⟩.
⟨emse-01792276⟩