Generalized Overall Equipment Effectiveness for integrated scheduling and process control

Type de document :
Communication dans un congrès
2016 International Symposium on Semiconductor Manufacturing (ISSM), Dec 2016, Tokyo, Japan. IEEE, 〈10.1109/ISSM.2016.7934514〉
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https://hal-emse.ccsd.cnrs.fr/emse-01792276
Contributeur : Stéphane Dauzère-Pérès <>
Soumis le : mardi 15 mai 2018 - 12:53:48
Dernière modification le : vendredi 15 mars 2019 - 01:14:12

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Yu-Ting Kao, Shi-Chung Chang, Jakey Blue, Stéphane Dauzère-Pérès. Generalized Overall Equipment Effectiveness for integrated scheduling and process control. 2016 International Symposium on Semiconductor Manufacturing (ISSM), Dec 2016, Tokyo, Japan. IEEE, 〈10.1109/ISSM.2016.7934514〉. 〈emse-01792276〉

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