Generalized Overall Equipment Effectiveness for integrated scheduling and process control

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https://hal-emse.ccsd.cnrs.fr/emse-01792276
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Tuesday, May 15, 2018 - 12:53:48 PM
Last modification on : Friday, March 15, 2019 - 1:14:12 AM

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Yu-Ting Kao, Shi-Chung Chang, Jakey Blue, Stéphane Dauzère-Pérès. Generalized Overall Equipment Effectiveness for integrated scheduling and process control. 2016 International Symposium on Semiconductor Manufacturing (ISSM), Dec 2016, Tokyo, Japan. ⟨10.1109/ISSM.2016.7934514⟩. ⟨emse-01792276⟩

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