Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook - Mines Saint-Étienne Access content directly
Conference Papers Year : 2014
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emse-01792294 , version 1 (15-05-2018)

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Claude Yugma, Jakey Blue, Stéphane Dauzère-Pérès, Philippe Vialletelle. Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook. 2014 IEEE International Conference on Automation Science and Engineering (CASE), Aug 2014, Taipei, Taiwan. ⟨10.1109/CoASE.2014.6899310⟩. ⟨emse-01792294⟩
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