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Modeling complex processability constraints in high-mix semiconductor manufacturing

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https://hal-emse.ccsd.cnrs.fr/emse-01792312
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Tuesday, May 15, 2018 - 1:14:24 PM
Last modification on : Wednesday, February 24, 2021 - 4:24:02 PM

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Ahmed Ben Amira, Stéphane Dauzère-Pérès, Philippe Lalevee, Guillaume Lepelletier, Philippe Vialletelle, et al.. Modeling complex processability constraints in high-mix semiconductor manufacturing. 2013 Winter Simulation Conference - (WSC 2013), Dec 2013, Washington, United States. ⟨10.1109/WSC.2013.6721732⟩. ⟨emse-01792312⟩

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