Qualification management and its impact on capacity optimization

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Conference papers
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https://hal-emse.ccsd.cnrs.fr/emse-01792313
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Tuesday, May 15, 2018 - 1:14:57 PM
Last modification on : Monday, February 25, 2019 - 10:26:08 AM

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Mehdi Rowshannahad, Stéphane Dauzère-Pérès, Bernard Cassini. Qualification management and its impact on capacity optimization. 2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2013), May 2013, Saratoga Springs, France. ⟨10.1109/ASMC.2013.6552792⟩. ⟨emse-01792313⟩

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