Impact of control plan design on tool risk management: A simulation study in semiconductor manufacturing - Mines Saint-Étienne
Conference Papers Year : 2011

Impact of control plan design on tool risk management: A simulation study in semiconductor manufacturing

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Operations Research [math.OC]

Stéphane Dauzère-Pérès  : Connect in order to contact the contributor

https://hal-emse.ccsd.cnrs.fr/emse-01792321

Submitted on : Tuesday, May 15, 2018-1:19:50 PM

Last modification on : Tuesday, September 17, 2024-3:45:05 PM

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emse-01792321 , version 1 (15-05-2018)

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Gloria Luz Rodriguez Verjan, Stéphane Dauzère-Pérès, Jacques Pinaton. Impact of control plan design on tool risk management: A simulation study in semiconductor manufacturing. 2011 Winter Simulation Conference - (WSC 2011), Dec 2011, Phoenix, France. ⟨10.1109/WSC.2011.6147905⟩. ⟨emse-01792321⟩

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