A dispatcher simulator for a photolithography workshop - Mines Saint-Étienne Access content directly
Conference Papers Year : 2007
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emse-01792347 , version 1 (15-05-2018)

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Claude Yugma, Romain Riffart, Stéphane Dauzère-Pérès, Philippe Vialletelle, Francois Buttin. A dispatcher simulator for a photolithography workshop. 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, Jun 2007, Stresa, France. ⟨10.1109/ASMC.2007.4595692⟩. ⟨emse-01792347⟩
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