A dispatcher simulator for a photolithography workshop

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https://hal-emse.ccsd.cnrs.fr/emse-01792347
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Tuesday, May 15, 2018 - 1:36:32 PM
Last modification on : Monday, February 25, 2019 - 10:26:08 AM

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Claude Yugma, Romain Riffart, Stéphane Dauzère-Pérès, Philippe Vialletelle, Francois Buttin. A dispatcher simulator for a photolithography workshop. 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, Jun 2007, Stresa, France. ⟨10.1109/ASMC.2007.4595692⟩. ⟨emse-01792347⟩

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