Conference Papers
Year : 2007
Stéphane Dauzère-Pérès : Connect in order to contact the contributor
https://hal-emse.ccsd.cnrs.fr/emse-01792352
Submitted on : Tuesday, May 15, 2018-1:37:59 PM
Last modification on : Tuesday, September 17, 2024-3:45:01 PM
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Nader Jedidi, Pascal Sallagoity, Agnès Roussy, Stéphane Dauzère-Pérès, Jacques Pinaton. Feed-forward run-to-run control for reduced parametric transistor variation in CMOS logic 0.13μm technology. 2007 International Symposium on Semiconductor Manufacturing, Oct 2007, Santa Clara, France. ⟨10.1109/ISSM.2007.4446831⟩. ⟨emse-01792352⟩
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