Feed-forward run-to-run control for reduced parametric transistor variation in CMOS logic 0.13μm technology - Mines Saint-Étienne Access content directly
Conference Papers Year : 2007

Feed-forward run-to-run control for reduced parametric transistor variation in CMOS logic 0.13μm technology

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emse-01792352 , version 1 (15-05-2018)

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Nader Jedidi, Pascal Sallagoity, Agnès Roussy, Stéphane Dauzère-Pérès, Jacques Pinaton. Feed-forward run-to-run control for reduced parametric transistor variation in CMOS logic 0.13μm technology. 2007 International Symposium on Semiconductor Manufacturing, Oct 2007, Santa Clara, France. ⟨10.1109/ISSM.2007.4446831⟩. ⟨emse-01792352⟩
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