Feed-forward run-to-run control for reduced parametric transistor variation in CMOS logic 0.13μm technology - Mines Saint-Étienne
Conference Papers Year : 2007

Feed-forward run-to-run control for reduced parametric transistor variation in CMOS logic 0.13μm technology

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Operations Research [math.OC]

Stéphane Dauzère-Pérès  : Connect in order to contact the contributor

https://hal-emse.ccsd.cnrs.fr/emse-01792352

Submitted on : Tuesday, May 15, 2018-1:37:59 PM

Last modification on : Tuesday, September 17, 2024-3:45:01 PM

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emse-01792352 , version 1 (15-05-2018)

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Nader Jedidi, Pascal Sallagoity, Agnès Roussy, Stéphane Dauzère-Pérès, Jacques Pinaton. Feed-forward run-to-run control for reduced parametric transistor variation in CMOS logic 0.13μm technology. 2007 International Symposium on Semiconductor Manufacturing, Oct 2007, Santa Clara, France. ⟨10.1109/ISSM.2007.4446831⟩. ⟨emse-01792352⟩

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