Importance of Qualification Management for Wafer Fabs - Mines Saint-Étienne
Conference Papers Year : 2007
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emse-01792361 , version 1 (15-05-2018)

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Carl Johnzén, Stéphane Dauzère-Pérès, Philippe Vialletelle, Claude Yugma. Importance of Qualification Management for Wafer Fabs. 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, Jun 2007, Stresa, France. ⟨10.1109/ASMC.2007.375107⟩. ⟨emse-01792361⟩
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