Importance of Qualification Management for Wafer Fabs - Mines Saint-Étienne
Conference Papers Year : 2007

Importance of Qualification Management for Wafer Fabs

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Operations Research [math.OC]

Stéphane Dauzère-Pérès  : Connect in order to contact the contributor

https://hal-emse.ccsd.cnrs.fr/emse-01792361

Submitted on : Tuesday, May 15, 2018-1:44:03 PM

Last modification on : Tuesday, September 17, 2024-3:45:23 PM

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emse-01792361 , version 1 (15-05-2018)

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Carl Johnzén, Stéphane Dauzère-Pérès, Philippe Vialletelle, Claude Yugma. Importance of Qualification Management for Wafer Fabs. 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, Jun 2007, Stresa, France. ⟨10.1109/ASMC.2007.375107⟩. ⟨emse-01792361⟩

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