Importance of Qualification Management for Wafer Fabs

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https://hal-emse.ccsd.cnrs.fr/emse-01792361
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Tuesday, May 15, 2018 - 1:44:03 PM
Last modification on : Monday, February 25, 2019 - 10:26:08 AM

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Carl Johnzén, Stéphane Dauzère-Pérès, Philippe Vialletelle, Claude Yugma. Importance of Qualification Management for Wafer Fabs. 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, Jun 2007, Stresa, France. ⟨10.1109/ASMC.2007.375107⟩. ⟨emse-01792361⟩

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