Impact of integrating equipment health in production scheduling for semiconductor fabrication - Mines Saint-Étienne
Journal Articles Computers & Industrial Engineering Year : 2018
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emse-01793390 , version 1 (16-05-2018)

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Yu-Ting Kao, Stéphane Dauzère-Pérès, Jakey Blue, Shi-Chung Chang. Impact of integrating equipment health in production scheduling for semiconductor fabrication. Computers & Industrial Engineering, 2018, 120, pp.450 - 459. ⟨10.1016/j.cie.2018.04.053⟩. ⟨emse-01793390⟩
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