Impact of integrating equipment health in production scheduling for semiconductor fabrication - Mines Saint-Étienne
Journal Articles Computers & Industrial Engineering Year : 2018

Impact of integrating equipment health in production scheduling for semiconductor fabrication

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Operations Research [math.OC]

Stéphane Dauzère-Pérès  : Connect in order to contact the contributor

https://hal-emse.ccsd.cnrs.fr/emse-01793390

Submitted on : Wednesday, May 16, 2018-2:56:59 PM

Last modification on : Tuesday, September 17, 2024-3:45:32 PM

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emse-01793390 , version 1 (16-05-2018)

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Yu-Ting Kao, Stéphane Dauzère-Pérès, Jakey Blue, Shi-Chung Chang. Impact of integrating equipment health in production scheduling for semiconductor fabrication. Computers & Industrial Engineering, 2018, 120, pp.450 - 459. ⟨10.1016/j.cie.2018.04.053⟩. ⟨emse-01793390⟩

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