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A Structure Data-Driven Framework for Virtual Metrology Modeling

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https://hal-emse.ccsd.cnrs.fr/emse-02499670
Contributor : Wei-Ting Yang <>
Submitted on : Thursday, March 5, 2020 - 2:28:59 PM
Last modification on : Wednesday, June 24, 2020 - 4:19:28 PM

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Wei-Ting Yang, Jakey Blue, Agnès Roussy, Jacques Pinaton, Marco Reis. A Structure Data-Driven Framework for Virtual Metrology Modeling. IEEE Transactions on Automation Science and Engineering, Institute of Electrical and Electronics Engineers, 2019, pp.1-10. ⟨10.1109/TASE.2019.2941047⟩. ⟨emse-02499670⟩

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