A Structure Data-Driven Framework for Virtual Metrology Modeling - Mines Saint-Étienne
Journal Articles IEEE Transactions on Automation Science and Engineering Year : 2019

A Structure Data-Driven Framework for Virtual Metrology Modeling

Wei-Ting Yang
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Jacques Pinaton
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Marco Reis
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emse-02499670 , version 1 (05-03-2020)

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Wei-Ting Yang, Jakey Blue, Agnès Roussy, Jacques Pinaton, Marco Reis. A Structure Data-Driven Framework for Virtual Metrology Modeling. IEEE Transactions on Automation Science and Engineering, 2019, pp.1-10. ⟨10.1109/TASE.2019.2941047⟩. ⟨emse-02499670⟩
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