A Structure Data-Driven Framework for Virtual Metrology Modeling - Mines Saint-Étienne
Journal Articles IEEE Transactions on Automation Science and Engineering Year : 2019

A Structure Data-Driven Framework for Virtual Metrology Modeling

Wei-Ting Yang
  • Function : Author
  • PersonId : 1065888
Jakey Blue
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  • PersonId : 2172
  • IdHAL : jakey-blue
Département Sciences de la Fabrication et Logistique
Agnès Roussy
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  • PersonId : 866543
Département Sciences de la Fabrication et Logistique
Jacques Pinaton
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  • PersonId : 914679
STMicroelectronics
Marco Reis
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Automatic Control Engineering Data Analysis, Statistics and Probability [physics.data-an]

Wei-Ting Yang  : Connect in order to contact the contributor

https://hal-emse.ccsd.cnrs.fr/emse-02499670

Submitted on : Thursday, March 5, 2020-2:28:59 PM

Last modification on : Tuesday, September 17, 2024-3:45:11 PM

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emse-02499670 , version 1 (05-03-2020)

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Wei-Ting Yang, Jakey Blue, Agnès Roussy, Jacques Pinaton, Marco Reis. A Structure Data-Driven Framework for Virtual Metrology Modeling. IEEE Transactions on Automation Science and Engineering, 2019, pp.1-10. ⟨10.1109/TASE.2019.2941047⟩. ⟨emse-02499670⟩

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