Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition - Mines Saint-Étienne
Conference Papers Year : 2018

Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition

Wei-Ting Yang
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  • PersonId : 1065888
Jacques Pinaton
  • Function : Author
  • PersonId : 914679
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emse-02499715 , version 1 (05-03-2020)

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Wei-Ting Yang, Jakey Blue, Agnès Roussy, Marco Reis, Jacques Pinaton. Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition. 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Apr 2018, Saratoga Springs, United States. pp.346-352, ⟨10.1109/ASMC.2018.8373161⟩. ⟨emse-02499715⟩
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