Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition - Mines Saint-Étienne
Conference Papers Year : 2018

Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition

Wei-Ting Yang
  • Function : Author
  • PersonId : 1065888
Jakey Blue
  • Function : Author
  • PersonId : 2172
  • IdHAL : jakey-blue
Département Sciences de la Fabrication et Logistique
Agnès Roussy
  • Function : Author
  • PersonId : 866543
Département Sciences de la Fabrication et Logistique
Marco Reis
  • Function : Author
University of Coimbra [Portugal]
Jacques Pinaton
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  • PersonId : 914679
STMicroelectronics

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Data Analysis, Statistics and Probability [physics.data-an]

Wei-Ting Yang  : Connect in order to contact the contributor

https://hal-emse.ccsd.cnrs.fr/emse-02499715

Submitted on : Thursday, March 5, 2020-2:40:19 PM

Last modification on : Tuesday, September 17, 2024-3:45:39 PM

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emse-02499715 , version 1 (05-03-2020)

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Wei-Ting Yang, Jakey Blue, Agnès Roussy, Marco Reis, Jacques Pinaton. Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition. 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Apr 2018, Saratoga Springs, United States. pp.346-352, ⟨10.1109/ASMC.2018.8373161⟩. ⟨emse-02499715⟩

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