A physics-informed Run-to-Run control framework for semiconductor manufacturing - Mines Saint-Étienne
Journal Articles Expert Systems with Applications Year : 2020

A physics-informed Run-to-Run control framework for semiconductor manufacturing

Wei-Ting Yang
  • Function : Author
  • PersonId : 1065888
Jakey Blue
  • Function : Author
  • PersonId : 2172
  • IdHAL : jakey-blue
Département Sciences de la Fabrication et Logistique
Agnès Roussy
  • Function : Author
  • PersonId : 866543
Département Sciences de la Fabrication et Logistique
Jacques Pinaton
  • Function : Author
  • PersonId : 914679
STMicroelectronics [Rousset]
Marco Reis
  • Function : Author
University of Coimbra [Portugal]

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Machine Learning [cs.LG]

Wei-Ting Yang  : Connect in order to contact the contributor

https://hal-emse.ccsd.cnrs.fr/emse-02703773

Submitted on : Monday, June 1, 2020-2:28:02 PM

Last modification on : Tuesday, September 17, 2024-3:45:17 PM

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emse-02703773 , version 1 (01-06-2020)

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Wei-Ting Yang, Jakey Blue, Agnès Roussy, Jacques Pinaton, Marco Reis. A physics-informed Run-to-Run control framework for semiconductor manufacturing. Expert Systems with Applications, 2020, 155, pp.113424. ⟨10.1016/j.eswa.2020.113424⟩. ⟨emse-02703773⟩

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