Conference Papers
Year : 2022
Benjamin Anthouard : Connect in order to contact the contributor
https://hal-emse.ccsd.cnrs.fr/emse-04190960
Submitted on : Wednesday, August 30, 2023-10:03:14 AM
Last modification on : Tuesday, August 27, 2024-12:55:29 PM
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- HAL Id : emse-04190960 , version 1
- DOI : 10.1109/ASMC54647.2022.9792488
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Benjamin Anthouard, Valeria Borodin, Quentin Christ, Stephane Dauzere-Peres, Renaud Roussel. A Simulation-Based Approach for Operational Management of Time Constraint Tunnels in Semiconductor Manufacturing : Topic: IE: Industrial Engineering. 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2022, Saratoga Springs, United States. pp.1-6, ⟨10.1109/ASMC54647.2022.9792488⟩. ⟨emse-04190960⟩
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