A Simulation-Based Approach for Operational Management of Time Constraint Tunnels in Semiconductor Manufacturing : Topic: IE: Industrial Engineering - Mines Saint-Étienne Access content directly
Conference Papers Year : 2022
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emse-04190960 , version 1 (30-08-2023)

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Benjamin Anthouard, Valeria Borodin, Quentin Christ, Stephane Dauzere-Peres, Renaud Roussel. A Simulation-Based Approach for Operational Management of Time Constraint Tunnels in Semiconductor Manufacturing : Topic: IE: Industrial Engineering. 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2022, Saratoga Springs, United States. pp.1-6, ⟨10.1109/ASMC54647.2022.9792488⟩. ⟨emse-04190960⟩
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