Hydrogen permeation through a thin film of palladium: influence of surface imputities
Abstract
In order to improve the reliability of a Pd-MOS hydrogen sensor, we have studied the influence of the surface state of a thin film of palladium on the hydrogen diffusion process. It has been shown that carbon, sulphur and oxygen could affect hydrogen energetic adsorption sites and in consequence the kinetic process of gas permeation through the membrane.