Skip to Main content Skip to Navigation
Journal articles

Influence des paramètres d'élaboration de couches minces de SnO2 sur les performances électriques. Application à la détection des gaz.

Abstract : Influence of elaboration parameters on the electrical properties of SnO2 thin films. Application to gas detection, SnO2 thin films present a great enterest for gas sensors. This study is devoted to the comparison of electrical performances of thin films obtained with two methods: reactive evaporation and CVD. The possibilities to control and adjust the microstructure and the textures of the films are described. The influence of the deposition canditions on the electrical properties of the film is also addressed.
Document type :
Journal articles
Complete list of metadatas

https://hal-emse.ccsd.cnrs.fr/emse-00435108
Contributor : Andrée-Aimée Toucas <>
Submitted on : Monday, November 23, 2009 - 3:42:58 PM
Last modification on : Wednesday, June 24, 2020 - 4:18:18 PM

Identifiers

  • HAL Id : emse-00435108, version 1

Citation

Christophe Pijolat, Laurent Bruno, René Lalauze. Influence des paramètres d'élaboration de couches minces de SnO2 sur les performances électriques. Application à la détection des gaz.. Annales de Chimie France, 1994, 20, pp.449-452. ⟨emse-00435108⟩

Share

Metrics

Record views

116