Influence des paramètres d'élaboration de couches minces de SnO2 sur les performances électriques. Application à la détection des gaz.
Résumé
Influence of elaboration parameters on the electrical properties of SnO2 thin films. Application to gas detection, SnO2 thin films present a great enterest for gas sensors. This study is devoted to the comparison of electrical performances of thin films obtained with two methods: reactive evaporation and CVD. The possibilities to control and adjust the microstructure and the textures of the films are described. The influence of the deposition canditions on the electrical properties of the film is also addressed.