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Guest Editorial: Equipment and Operations Automation in the Semiconductor Industry

James R. Morrison 1 Chen-Fu Chien 2 Stéphane Dauzère-Pérès 3 Milind Dawande 4 Han Ding 5 Jeffrey S. Pettinato 6 Jingang Yi 7
1 KAIST - Department of Industrial and Systems Engineering [Korea]
2 NTHU - National Tsing Hua University [Hsinchu]
3 SFL-ENSMSE - Département Sciences de la Fabrication et Logistique
4 University of Texas at Austin [Austin]
5 Shanghai Jiao Tong University - Institute of Robotics
6 Intel Corporation [USA]
7 RU - Rutgers, The State University of New Jersey [New Brunswick]
Abstract : The semiconductor industry is a key element of all modern economies, contributing either directly via manufacturing of computer chips or indirectly through manufacturing of high-tech goods and the support of services. However, this value comes at a cost. Semiconductor wafer fabrication is arguably the most complex of all manufacturing processes and a state-of-the-art wafer fabrication facility can cost on the order of US $5 billion. As such, equipment and operations automation promises to lead the revolution toward the next-generation factories; it is the theme of this Special Section of the IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING.
Keywords : semiconductor manufacturing Equipment and Operations Automation
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https://hal-emse.ccsd.cnrs.fr/emse-00554728
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Tuesday, January 11, 2011 - 11:10:00 AM
Last modification on : Wednesday, June 24, 2020 - 4:19:22 PM

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James R. Morrison, Chen-Fu Chien, Stéphane Dauzère-Pérès, Milind Dawande, Han Ding, et al.. Guest Editorial: Equipment and Operations Automation in the Semiconductor Industry. IEEE Transactions on Automation Science and Engineering, Institute of Electrical and Electronics Engineers, 2011, 8 (1), pp.1-4. ⟨10.1109/TASE.2010.2078870⟩. ⟨emse-00554728⟩

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