A KDD Model to Discover Correlated Parameters in Semiconductor Manufacturing Processes

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Communication dans un congrès
10th European Conference on Advanced Equipment Control / Advanced Process Control, Apr 2010, Catania, Italy
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https://hal-emse.ccsd.cnrs.fr/emse-00554762
Contributeur : Christian Ernst <>
Soumis le : mardi 11 janvier 2011 - 12:07:04
Dernière modification le : vendredi 9 mars 2018 - 11:24:43

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  • HAL Id : emse-00554762, version 1

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Alain Casali, Christian Ernst. A KDD Model to Discover Correlated Parameters in Semiconductor Manufacturing Processes. 10th European Conference on Advanced Equipment Control / Advanced Process Control, Apr 2010, Catania, Italy. 〈emse-00554762〉

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