A KDD Model to Discover Correlated Parameters in Semiconductor Manufacturing Processes

Document type :
Conference papers
Complete list of metadatas

https://hal-emse.ccsd.cnrs.fr/emse-00554762
Contributor : Christian Ernst <>
Submitted on : Tuesday, January 11, 2011 - 12:07:04 PM
Last modification on : Tuesday, October 23, 2018 - 2:36:10 PM

Identifiers

  • HAL Id : emse-00554762, version 1

Citation

Alain Casali, Christian Ernst. A KDD Model to Discover Correlated Parameters in Semiconductor Manufacturing Processes. 10th European Conference on Advanced Equipment Control / Advanced Process Control, Apr 2010, Catania, Italy. ⟨emse-00554762⟩

Share

Metrics

Record views

89