A KDD Model to Discover Correlated Parameters in Semiconductor Manufacturing Processes - Mines Saint-Étienne Access content directly
Conference Papers Year : 2010

A KDD Model to Discover Correlated Parameters in Semiconductor Manufacturing Processes

Domains

Other [cs.OH]
No file

Dates and versions

emse-00554762 , version 1 (11-01-2011)

Identifiers

  • HAL Id : emse-00554762 , version 1

Cite

Alain Casali, Christian Ernst. A KDD Model to Discover Correlated Parameters in Semiconductor Manufacturing Processes. 10th European Conference on Advanced Equipment Control / Advanced Process Control, Apr 2010, Catania, Italy. ⟨emse-00554762⟩
54 View
0 Download

Share

Gmail Mastodon Facebook X LinkedIn More