Tailoring the Crystallographic Texture and Electrical Properties of Inkjet-printed Interconnects for Use in Microelectronics - Mines Saint-Étienne Access content directly
Conference Papers Year : 2011

Tailoring the Crystallographic Texture and Electrical Properties of Inkjet-printed Interconnects for Use in Microelectronics

Abstract

In this paper, silver nanoparticles with a mean diameter of 40 nm are studied for future applications in microelectronic devices. The enhanced diffusivity of nanoparticles is exploited to fabricate electrical interconnects at low temperature. Sintering condition has been tuned to tailor the grain size so that electrical resistivity can be lowered down to 3.4 µOhm∙cm. In this study, a {111}-textured gold thin film has been used to increase diffusion routes. The combined effects of the substrate crystalline orientation and the sintering condition have been demonstrated to have a significant impact on microstructures. In particular, a {111} fiber texture is developed above 300°C in printed silver only if the underlying film exhibits a preferential orientation. This condition appeared as essential for the efficiency of the gold wire-bonding process step. Thus, inkjet-printed interconnects show a prospective potential compared to conventional subtractive technique and offers new opportunities for low cost metallization in electronics packaging.
Fichier principal
Vignette du fichier
2011_Cauchois_MRS.pdf (597.92 Ko) Télécharger le fichier
Origin Publisher files allowed on an open archive
Loading...

Dates and versions

emse-00576968 , version 1 (03-10-2012)

Identifiers

Cite

Romain Cauchois, Mohamed Saadaoui, Karim Inal, Béatrice Dubois-Bonvalot, Jean-Christophe Fidalgo. Tailoring the Crystallographic Texture and Electrical Properties of Inkjet-printed Interconnects for Use in Microelectronics. Materials Research Society Spring Meeting, 2011, San Francisco, United States. pp.O8.10, ⟨10.1557/opl.2011.1264⟩. ⟨emse-00576968⟩
190 View
373 Download

Altmetric

Share

Gmail Mastodon Facebook X LinkedIn More