Skip to Main content Skip to Navigation
Conference papers

Optimized Management of Controls in Semiconductor Manufacturing

Abstract : In order to minimize yield losses due to excursions, when a process or a tool shifts out of specifications, an algorithm is proposed to reduce the scope of analysis and provide in real time the number of lots po-tentially impacted. The algorithm is based on a Permanent Index per Context (IPC). The IPC allows a very large amount of data to be managed and helps to compute global risk indicators on production. The information provided by the IPC allows for the quick quantification of the potential loss in the production, and the identification of the set of production tools most likely to be the source of the excursion and the set of lots potentially impacted. A prototype has been developed for the defectivity workshop. Results show that the time of analysis can be strongly reduced and the average cycle time improved.
Complete list of metadata

Cited literature [15 references]  Display  Hide  Download
Contributor : Justin Nduhura Connect in order to contact the contributor
Submitted on : Wednesday, December 21, 2011 - 5:28:39 PM
Last modification on : Wednesday, June 24, 2020 - 4:19:21 PM
Long-term archiving on: : Thursday, March 22, 2012 - 2:20:24 AM


Files produced by the author(s)


  • HAL Id : emse-00642270, version 1


Justin Nduhura-Munga, Stéphane Dauzère-Pérès, Philippe Vialletelle, Claude Yugma. Optimized Management of Controls in Semiconductor Manufacturing. Winter Simulation Conference - Session: Modeling and Analysis of Semiconductor Manufacturing (MASM), Dec 2011, Phoenix, Arizona, United States. pp.1-8. ⟨emse-00642270⟩



Record views


Files downloads