Data Preparation in the MineCor KDD Framework
Abstract
Yield enhancement is a key issue in semiconductor manufacturing. Data mining tools can therefore be helpful, by extracting hidden links between numerous complex process control parameters. In order to highlight correlations between such parameters, we developed a complete Knowledge Discovery in Databases (KDD) model, called MineCor. Its mining heart uses a new method derived from association rules programming, based on lectic search and contingency vectors. After recalling these concepts, this paper focuses on data preprocessing and transformation functions, which have an important impact on final results. An overall presentation of these functions, of some significant experimental results and of associated performances are provided and finally discussed.