Characterization and TCAD simulation of 90 nm technology transistors under continuous photoelectric laser stimulation for failure analysis improvement

Alexandre Sarafianos; R. Llido; Olivier Gagliano; Valérie Serradeil; V. Goubier; M. Lisart; G. Haller; V. Pouget; D. Lewis; Jean-Max Dutertre; Assia Tria

Characterization and TCAD simulation of 90 nm technology transistors under continuous photoelectric laser stimulation for failure analysis improvement

Alexandre Sarafianos ^{1, 2} R. Llido ² Olivier Gagliano ² Valérie Serradeil ² V. Goubier ² M. Lisart ² G. Haller ² V. Pouget ³ D. Lewis ³ Jean-Max Dutertre ¹ Assia Tria ^{1, 4}

1 SAS-ENSMSE - Département Systèmes et Architectures Sécurisés

2 ST-ROUSSET - STMicroelectronics [Rousset]

3 IMS - Laboratoire de l'intégration, du matériau au système

4 CEA-LETI - Laboratoire d'Electronique et des Technologies de l'Information

Abstract : This study is driven by the need to optimize failure analysis methodologies based on laser/silicon interactions, using the functional response of an integrated circuit to local laser stimulation. It is therefore mandatory to understand the behavior of elementary devices to laser illumination, in order to model and predict the behavior of more complex circuits. This paper characterizes and analyses photoelectric effects induced by static 1064 nm wavelength laser on a 90 nm technology NMOS transistor. Comparisons between photocurrents in short or long channel transistor, or in function of its state (on or off) are presented. Experimental measurements are correlated to Finite Elements Modeling Technology Computer Aided Design (TCAD) analyses, which gives a physical insight of carriers generation and transport in the devices.

Document type :

Conference papers

Domain :

Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics

Complete list of metadatas

https://hal-emse.ccsd.cnrs.fr/emse-00742705
Contributor : Hélène Le Bouder <>
Submitted on : Wednesday, October 17, 2012 - 8:42:50 AM
Last modification on : Monday, February 25, 2019 - 4:34:17 PM

Characterization and TCAD simulation of 90 nm technology transistors under continuous photoelectric laser stimulation for failure analysis improvement

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Characterization and TCAD simulation of 90 nm technology transistors under continuous photoelectric laser stimulation for failure analysis improvement

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