Spatial Variance Spectrum Analysis and Its Application to Unsupervised Detection of Systematic Wafer Spatial Variations

Abstract : Investigation of wafer spatial variations is critical for semiconductor process/equipment optimization and circuit design. The objective of spatial variation study is to differentiate the systematic variation component from the random component. This is usually done by contrasting with a set of known systematic patterns based on engineering knowledge. However, there could exist unknown systematic components remaining in the unexplained residuals and overlooked by the conventional spatial variation study. In this paper, we develop a novel spatial variance spectrum (SVS) to analyze the systematic variations without any priori information of the systematic patterns. The SVS is a series of spatial variations over a range of spatial moving window sizes from the smallest spatial moving window consisting of only two metrology sites to the largest one covering all metrology sites of the entire wafer. The SVS can be used to characterize the wafer spatial variations and to detect existence of systematic variations by a proposed hypothesis test. We also propose an index to summarize from the SVS the systematic proportion of the spatial variation. The proposed test and index of systematic variations will be demonstrated and validated through both hypothetical examples and actual cases of wafer critical dimension (CD) metrology data.
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Article dans une revue
IEEE Transactions on Automation Science and Engineering, Institute of Electrical and Electronics Engineers, 2011, 8 (1), pp.56-66
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https://hal-emse.ccsd.cnrs.fr/emse-01098363
Contributeur : Jakey Blue <>
Soumis le : mercredi 24 décembre 2014 - 09:00:32
Dernière modification le : mardi 23 octobre 2018 - 14:36:10

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  • HAL Id : emse-01098363, version 1

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Jakey Blue, Argon Chen. Spatial Variance Spectrum Analysis and Its Application to Unsupervised Detection of Systematic Wafer Spatial Variations. IEEE Transactions on Automation Science and Engineering, Institute of Electrical and Electronics Engineers, 2011, 8 (1), pp.56-66. 〈emse-01098363〉

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