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Allocating Metrology Capacity to Multiple Heterogeneous Machines

Abstract : The measurement of lots to check process quality is crucial but also a non-added value operation in manufacturing systems. This paper is motivated by semiconductor manufacturing, where metrology tools are expensive, thus limiting metrology capacity which must be optimally used. In a context where multiple heterogeneous machines are sharing a common metrology workshop, the problem of minimising risk while considering metrology capacity arises. An integer linear programming (ILP) model is presented, which corresponds to a multiple-choice knapsack problem. Simple rounding heuristics are proposed, whose results on randomly generated instances are compared with the optimal solutions obtained using a standard solver on the ILP. Additionally, numerical experiments on industrial data are presented and discussed.
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Contributor : Stéphane Dauzère-Pérès Connect in order to contact the contributor
Submitted on : Tuesday, July 4, 2017 - 12:20:59 PM
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Stéphane Dauzere-Peres, Michael Hassoun, Alejandro Sendon. Allocating Metrology Capacity to Multiple Heterogeneous Machines. International Journal of Production Research, Taylor & Francis, 2016, 54 (20), pp.6082-6091. ⟨10.1080/00207543.2016.1187775⟩. ⟨emse-01555691⟩



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