Equipment Anomaly Detection and Automatic Fault Fingerprint Extraction in Semiconductor Manufacturing

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https://hal-emse.ccsd.cnrs.fr/emse-01621968
Contributor : Hamideh Rostami <>
Submitted on : Monday, October 23, 2017 - 9:45:37 PM
Last modification on : Tuesday, October 23, 2018 - 2:36:10 PM

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  • HAL Id : emse-01621968, version 1

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Hamideh Rostami, Jakey Blue, Claude Yugma. Equipment Anomaly Detection and Automatic Fault Fingerprint Extraction in Semiconductor Manufacturing. International Symposium on Semiconductor Manufacturing Intelligence (ISMI) , Aug 2016, Hsinchu, Taiwan. ⟨emse-01621968⟩

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