Equipment Health Modelling for Deterioration Prognosis and Fault Signatures Diagnosis

Complete list of metadatas

https://hal-emse.ccsd.cnrs.fr/emse-01621971
Contributor : Hamideh Rostami <>
Submitted on : Monday, October 23, 2017 - 9:50:42 PM
Last modification on : Tuesday, October 23, 2018 - 2:36:10 PM

Identifiers

  • HAL Id : emse-01621971, version 1

Collections

Citation

Hamideh Rostami, Jakey Blue, Claude Yugma. Equipment Health Modelling for Deterioration Prognosis and Fault Signatures Diagnosis. SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2017, Saratoga Springs, NY, United States. ⟨emse-01621971⟩

Share

Metrics

Record views

74