Equipment Health Modelling for Deterioration Prognosis and Fault Signatures Diagnosis

Type de document :
Communication dans un congrès
SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2017, Saratoga Springs, NY, United States
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https://hal-emse.ccsd.cnrs.fr/emse-01621971
Contributeur : Hamideh Rostami <>
Soumis le : lundi 23 octobre 2017 - 21:50:42
Dernière modification le : lundi 30 octobre 2017 - 10:06:14

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  • HAL Id : emse-01621971, version 1

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Hamideh Rostami, Jakey Blue, Claude Yugma. Equipment Health Modelling for Deterioration Prognosis and Fault Signatures Diagnosis. SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2017, Saratoga Springs, NY, United States. 〈emse-01621971〉

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