Conference Papers
Year : 2017
Hamideh Rostami : Connect in order to contact the contributor
https://hal-emse.ccsd.cnrs.fr/emse-01621971
Submitted on : Monday, October 23, 2017-9:50:42 PM
Last modification on : Tuesday, September 17, 2024-3:46:01 PM
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- HAL Id : emse-01621971 , version 1
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Hamideh Rostami, Jakey Blue, Claude Yugma. Equipment Health Modelling for Deterioration Prognosis and Fault Signatures Diagnosis. SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2017, Saratoga Springs, NY, United States. ⟨emse-01621971⟩
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