Management of crisis situations in a large unified AMHS of a semiconductor manufacturing facility: IE: Industrial engineering

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https://hal-emse.ccsd.cnrs.fr/emse-01792280
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Tuesday, May 15, 2018 - 12:54:56 PM
Last modification on : Friday, March 15, 2019 - 1:14:58 AM

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Moulaye Aidara Ndiaye, Stéphane Dauzère-Pérès, Claude Yugma, Lionel Rulliere, Gilles Lamiable. Management of crisis situations in a large unified AMHS of a semiconductor manufacturing facility: IE: Industrial engineering. 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2016, Saratoga Springs, United States. ⟨10.1109/ASMC.2016.7491112⟩. ⟨emse-01792280⟩

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