Simulation model to control risk levels on process equipment through metrology in semiconductor manufacturing

Type de document :
Communication dans un congrès
2015 Winter Simulation Conference (WSC), Dec 2015, Huntington Beach, United States. IEEE, 〈10.1109/WSC.2015.7408397〉
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https://hal-emse.ccsd.cnrs.fr/emse-01792282
Contributeur : Stéphane Dauzère-Pérès <>
Soumis le : mardi 15 mai 2018 - 12:56:43
Dernière modification le : vendredi 15 mars 2019 - 01:14:52

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Alejandro Sendon, Stéphane Dauzère-Pérès, Jacques Pinaton. Simulation model to control risk levels on process equipment through metrology in semiconductor manufacturing. 2015 Winter Simulation Conference (WSC), Dec 2015, Huntington Beach, United States. IEEE, 〈10.1109/WSC.2015.7408397〉. 〈emse-01792282〉

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