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Production control in semiconductor manufacturing with time constraints

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https://hal-emse.ccsd.cnrs.fr/emse-01792284
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Tuesday, May 15, 2018 - 12:57:42 PM
Last modification on : Wednesday, June 24, 2020 - 4:19:27 PM

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Rezvan Sadeghi, Stéphane Dauzère-Pérès, Claude Yugma, Guillaume Lepelletier. Production control in semiconductor manufacturing with time constraints. 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2015, Saratoga Springs, United States. ⟨10.1109/ASMC.2015.7164446⟩. ⟨emse-01792284⟩

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