Qualification management to reduce workload variability in semiconductor manufacturing

Mehdi Rowshannahad 1, 2, 3 Stéphane Dauzère-Pérès 1, 2 Bernard Cassini 3
1 SFL-ENSMSE - Département Sciences de la Fabrication et Logistique
2 LIMOS - Laboratoire d'Informatique, de Modélisation et d'Optimisation des Systèmes
3 Soitec SA
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Conference papers
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https://hal-emse.ccsd.cnrs.fr/emse-01792288
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Tuesday, May 15, 2018 - 12:59:15 PM
Last modification on : Monday, January 20, 2020 - 12:14:06 PM

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EMSE | INSTITUT-TELECOM | SFL-ENSMSE | CNRS | LIMOS | PRES_CLERMONT

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Mehdi Rowshannahad, Stéphane Dauzère-Pérès, Bernard Cassini. Qualification management to reduce workload variability in semiconductor manufacturing. 2014 Winter Simulation Conference - (WSC 2014), Dec 2014, Savanah, United States. ⟨10.1109/WSC.2014.7020087⟩. ⟨emse-01792288⟩

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