Smart dynamic sampling for wafer at risk reduction in semiconductor manufacturing

Document type :
Conference papers
Complete list of metadatas

https://hal-emse.ccsd.cnrs.fr/emse-01792292
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Tuesday, May 15, 2018 - 1:01:06 PM
Last modification on : Friday, March 15, 2019 - 1:14:52 AM

Identifiers

Citation

Sylvain Housseman, Stéphane Dauzère-Pérès, Gloria Rodriguez-Verjan, Jacques Pinaton. Smart dynamic sampling for wafer at risk reduction in semiconductor manufacturing. 2014 IEEE International Conference on Automation Science and Engineering (CASE), Aug 2014, Taipei, Taiwan. ⟨10.1109/CoASE.2014.6899414⟩. ⟨emse-01792292⟩

Share

Metrics

Record views

78