Modeling and analysis of semiconductor manufacturing in a shrinking world: Challenges and successes

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https://hal-emse.ccsd.cnrs.fr/emse-01792338
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Tuesday, May 15, 2018 - 1:32:18 PM
Last modification on : Wednesday, August 21, 2019 - 10:38:02 AM

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Chen-Fu Chien, Stéphane Dauzère-Pérès, Hans Ehm, John Fowler, Zhibin Jiang, et al.. Modeling and analysis of semiconductor manufacturing in a shrinking world: Challenges and successes. 2008 Winter Simulation Conference (WSC), Dec 2008, Miami, France. ⟨10.1109/WSC.2008.4736306⟩. ⟨emse-01792338⟩

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