A Batch Optimization Sofware for diffusion area scheduling in semiconductor manufacturing

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https://hal-emse.ccsd.cnrs.fr/emse-01792345
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Tuesday, May 15, 2018 - 1:34:31 PM
Last modification on : Monday, February 25, 2019 - 10:26:08 AM

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Claude Yugma, Stéphane Dauzère-Pérès, Alexandre Derreumaux, Olivier Sibille. A Batch Optimization Sofware for diffusion area scheduling in semiconductor manufacturing. 2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2008, Cambridge, France. ⟨10.1109/ASMC.2008.4529063⟩. ⟨emse-01792345⟩

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