A Batch Optimization Sofware for diffusion area scheduling in semiconductor manufacturing - Mines Saint-Étienne Access content directly
Conference Papers Year : 2008

A Batch Optimization Sofware for diffusion area scheduling in semiconductor manufacturing

No file

Dates and versions

emse-01792345 , version 1 (15-05-2018)

Identifiers

Cite

Claude Yugma, Stéphane Dauzère-Pérès, Alexandre Derreumaux, Olivier Sibille. A Batch Optimization Sofware for diffusion area scheduling in semiconductor manufacturing. 2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2008, Cambridge, France. ⟨10.1109/ASMC.2008.4529063⟩. ⟨emse-01792345⟩
25 View
0 Download

Altmetric

Share

Gmail Mastodon Facebook X LinkedIn More